Aluminum oxide (Al₂O₃) ceramic targets offer exceptional purity, optimized thermal conductivity, and superior mechanical strength. Designed for industrial coating applications, they ensure reliable deposition, extended durability, and precise structural integrity.
Product Overview
The aluminum oxide ceramic target is made from high-purity aluminum oxide (Al₂O₃), offering excellent physical and chemical properties. With its white appearance, it is known for its high hardness, density, and melting point. Aluminum oxide targets are widely used in thin film deposition applications, delivering stable performance under various conditions. Depending on the heat treatment process, aluminum oxide can be converted into different crystal forms, with gamma (γ) active aluminum oxide being the most common.
Features
- Exceptional hardness and mechanical strength, with a hardness range of 2700-3000.
- Good wear resistance and corrosion resistance, making it suitable for harsh environments.
- High transparency and excellent optical properties.
- High thermal stability, with a melting point of up to 2045°C.
- Excellent electrical insulation performance.
Applications
Aluminum oxide ceramic targets are widely used in fields such as fuel cells, coatings, semiconductors, displays, LEDs, photovoltaic devices, and glass coatings. Thin films deposited from aluminum oxide targets are known for their high hardness, wear resistance, and mechanical strength, making them ideal for various mechanical, optical, and microelectronic applications.