Quartz wafer is a high-purity, precision-engineered material widely used in semiconductor manufacturing, optical applications, and electronic components. Characterized by its exceptional thermal stability, low thermal expansion, and superior optical clarity, it provides a reliable substrate for high-performance devices. With excellent resistance to chemical corrosion and mechanical stress, quartz wafers ensure durability and precision in demanding industrial and scientific applications.
Product Overview
Quartz wafers are made from high-quality synthetic quartz glass, offering high precision in flatness and surface roughness. These wafers are ideal for precision applications in fields such as semiconductors, biotechnology, and microelectromechanical systems (MEMS). The wafers can be customized to various sizes and thicknesses, with a maximum diameter of φ300mm and a minimum thickness of 0.5mm. The material provides excellent optical performance and thermal stability, making it suitable for various high-end technology applications.
Key Features
- High-Quality Synthetic Quartz Glass: Made from top-grade synthetic quartz glass, ensuring excellent optical performance and structural stability.
- Precise Dimensions and Surface Quality: Features high precision in flatness and surface roughness, meeting the strict requirements of high-precision applications.
- Customizable Size and Thickness: Wafers can be customized according to customer needs, with diameters up to φ300mm and thicknesses as thin as 0.5mm.
- Excellent Thermal Stability: Offers outstanding thermal stability, suitable for use in high-temperature environments, ensuring long-term reliability.
Applications
- Semiconductor Manufacturing: Used in semiconductor processes such as photolithography and etching, serving as high-precision optical components and substrates.
- Biotechnology: Used as a critical substrate material in biosensors and other biotechnology applications.
- MEMS (Microelectromechanical Systems): Widely used in MEMS applications, serving as substrates for sensors and other miniaturized devices.
- HTPS (High-Temperature Polycrystalline Silicon TFT LCD): Key optical components in high-temperature polycrystalline silicon thin-film transistor (TFT) liquid crystal display technology.
- High-End Technology Fields: Applied in high-precision instruments, laboratory equipment, and other fields requiring high stability.
Property | Value |
Thickness | ≥0.5 mm |
Dimensional Tolerance (mm) | Diameter ± 0.1, Thickness ± 0.02 mm |
Flatness (PV) (Clear Surface) | ≤ λ (λ = 632.8 nm) |
TTV | ≤ 1 μm (φ 200 mm) |
Surface Roughness (Ra) | ≤ 0.01 μm |
Scratch | Width ≤ 10 μm |
Pit | Diameter ≤ 25 μm |
Edge Chips (μm) | ≤ 300 μm (edge), ≤ 200 μm (surface) |