MOCVD Graphite Tray
MOCVD Graphite Tray
MOCVD Graphite Tray
MOCVD Graphite Tray

MOCVD Graphite Tray

  • element:Graphite
  • purity:High Purity
  • shape:Disc
  • specification:φ330 mm
  • packaging:Customizable based on customer needs

MOCVD graphite trays are high-precision carbon components designed for metal-organic chemical vapor deposition (MOCVD) processes in semiconductor and optoelectronic manufacturing. These trays provide superior thermal stability, high chemical resistance, and optimized structural integrity, ensuring uniform heat distribution and minimal contamination. Manufactured using advanced high-purity graphite processing techniques, MOCVD graphite trays support high-efficiency wafer handling, epitaxial growth, and thin-film deposition, delivering reliable performance in extreme high-temperature environments.

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Product Overview
The MOCVD graphite tray is a specialized support component used in the Metal Organic Chemical Vapor Deposition (MOCVD) process. It is designed to hold substrates and provide stable support under high-temperature conditions. Through precision machining and uniform coating treatment, the tray optimizes light reflection inside the reactor, ensuring uniform illumination and efficient deposition processes. It is widely used in high-precision manufacturing fields, such as semiconductors, LEDs, and optoelectronics.

Key Features

  • High Light Reflection Performance: Enhances reflection, ensuring uniform light intensity during the MOCVD process and improving deposition uniformity.
  • High Temperature Resistance: The tray is stable under high-temperature conditions, meeting the demands of MOCVD processes.
  • Uniform Coating: The coating is evenly applied, improving corrosion resistance, thermal stability, and extending product lifespan.
  • High Purity Graphite Material: Made from high-purity graphite, ensuring long-term stability and reliability in high-temperature and high-pressure conditions.

Applications

  • Semiconductor Manufacturing: Used in MOCVD reactors for semiconductor production to optimize light reflection and ensure uniform deposition layers.
  • LED Manufacturing: Widely used in LED production to enhance light reflection, improving light source efficiency.
  • Optoelectronics: Applied in the manufacture of optoelectronic components, ensuring uniform light and temperature distribution within the reactor.
  • Precision Manufacturing: Ideal for high-precision manufacturing environments, ensuring precise control of the deposition process and efficient production.

 

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