Boron Nitride (BN) Ceramic Target is a high-performance sputtering target material composed of pure hexagonal boron nitride (h-BN). These targets exhibit exceptional thermal stability (up to 3000°C in inert atmospheres), outstanding electrical insulation, and superior chemical inertness. With low thermal expansion and excellent dielectric properties, BN ceramic targets are widely used in thin film deposition processes for semiconductor manufacturing, optical coatings, and advanced material research. The material’s anisotropic thermal conductivity (≈600 W/mK in-plane) and lubricious properties make it ideal for producing wear-resistant, thermally conductive coatings in demanding applications.
Product Overview
Boron Nitride (BN) ceramic target is a high-temperature, chemically resistant ceramic material made from boron and nitrogen elements. With a melting point up to 3000°C and a density of 2.25g/cm³, it often exists in a hexagonal crystal structure, providing excellent thermal and chemical stability. BN ceramic targets have a wide range of applications in nanotechnology and can be used to produce BN nanotubes, which have a structure similar to carbon nanotubes.
Key Features
- High Melting Point: Can withstand temperatures up to 3000°C.
- Superior Thermal and Chemical Stability: Remains stable under extreme conditions.
- Wide Applicability: Potential for use in nanotechnology and high-temperature equipment.
- Lubricity and Softness: Its hexagonal crystal structure, similar to graphite, provides excellent lubricating properties.
Applications
Boron Nitride ceramic targets are used in a variety of industries, including:
- Thin Film Deposition: Used in fuel cells, semiconductors, LEDs, photovoltaic devices, and glass coatings.
- High-Temperature Equipment: Due to its exceptional thermal and chemical stability, it is widely used in manufacturing high-temperature equipment.
- Nanotechnology: Has potential applications in nanotechnology, particularly in the production of BN nanotubes.
- High-Temperature and High-Pressure Environments: Used as a refractory material in high-temperature and high-pressure environments.